Downloads

Here you can find a list of product documents and datasheets as well as links to a selection of papers that use SML resist.

Product Documents

SML Resist Product InformationDownload
SML2000 Etch StudyDownload
SML Resist Optical StudyDownload
SML Resist - Safety Data Sheet (SDS)Download
PMMA Data SheetDownload
PMMA Processing InformationDownload
PMMA 950K Spin CurvesDownload
PMMA 495K Spin CurvesDownload
PMMA - Safety Data Sheet (SDS)Download
PMMA DUV ExposureDownload
PMMA Developers & RemoversDownload

Papers

Correlation of lithographic performance of the electron beam resists SML and ZEP with their chemical structure
A. Gangnaik et al.
Journal of Vacuum Science and Technology B
July 2015
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OrmoStamp mold fabrication via PBW for NIL
F. Liu, Y. Yao, J.A. van Kan
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Characterisation of a novel electron beam lithography resist, SML and its comparison to PMMA and ZEP resists
A. Gangnaik et al.
Microelectronic Engineering
May 2013
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SML resist processing for high-aspect-ratio and high-sensitivity electron beam lithography
M. Mohammad et al.
Nanoscale Research Letters
March 2013
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Influence of Nanocomposite Materials for Next Generation Nano Lithography
S. Lewis and Lucio Piccirillo
Advances in Diverse Industrial Applications of Nanocomposites - Chapter 20
March 2011
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Characterization of an Ultra High Aspect Ratio Electron Beam Resist for Nano-Lithography
S. Lewis et al.
NSTI - Nanotech 2010 - Conference Proceedings
2010
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Surface characterisation of poly(methylmethacrylate) based nanocomposite thin films containing Al2O3 and TiO2 nanoparticles
S. Lewis et al.
Thin Solid Films
2010
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Sharp switching behaviour in graphene nanoribbon p-n junction
A. Hammam et al.
Carbon
2017
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