Electron Beam Resists

Positive Tone Resists

SML Resist is a high resolution, high aspect ratio positive tone electron beam resist. It has excellent adhesion properties and great etch resistance.

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PMMA Resist is the industry standard positive tone resist for electron beam lithography. We offer PMMA in a wide range of molecular weights and thicknesses.

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Negative Tone Resists

HSQ Resist is a high resolution negative tone resist. Due to its Si base, it’s used in many applications that require high etch resistance. We supply HSQ pre-mixed or in kit form.

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