Positive Tone Resists
SML Resist is a high resolution, high aspect ratio positive tone electron beam resist. It has excellent adhesion properties and great etch resistance.
PMMA Resist is the industry standard positive tone resist for electron beam lithography. We offer PMMA in a wide range of molecular weights and thicknesses.
Negative Tone Resists
HSQ Resist is a high resolution negative tone resist. Due to its Si base, it’s used in many applications that require high etch resistance. We supply HSQ pre-mixed or in kit form.