Here you can find a list of product documents and datasheets as well as links to a selection of papers that use SML resist.
Product Documents
| SML Resist Product Information | Download |
| SML2000 Etch Study | Download |
| SML Resist Optical Study | Download |
| SML Resist - Safety Data Sheet (SDS) | Download |
| PMMA Data Sheet | Download |
| PMMA Processing Information | Download |
| PMMA 950K Spin Curves | Download |
| PMMA 495K Spin Curves | Download |
| PMMA - Safety Data Sheet (SDS) | Download |
| PMMA DUV Exposure | Download |
| PMMA Developers & Removers | Download |
Papers
| Fabrication of bio-inspired 3D nanoimprint mold using acceleration-voltage-modulation electron-beam lithography Kohei Goto and Jun Taniguchi Advanced Optical Technologies 2019 | View |
| Sharp switching behaviour in graphene nanoribbon p-n junction A. Hammam et al. Carbon 2017 | View |
| OrmoStamp mold fabrication via PBW for NIL F. Liu, Y. Yao, J.A. van Kan Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2015 | View |
| Correlation of lithographic performance of the electron beam resists SML and ZEP with their chemical structure A. Gangnaik et al. Journal of Vacuum Science and Technology B July 2015 | View |
| SML resist processing for high-aspect-ratio and high-sensitivity electron beam lithography M. Mohammad et al. Nanoscale Research Letters March 2013 | View |
| Characterisation of a novel electron beam lithography resist, SML and its comparison to PMMA and ZEP resists A. Gangnaik et al. Microelectronic Engineering May 2013 | View |
| Influence of Nanocomposite Materials for Next Generation Nano Lithography S. Lewis and Lucio Piccirillo Advances in Diverse Industrial Applications of Nanocomposites - Chapter 20 March 2011 | View |
| Surface characterisation of poly(methylmethacrylate) based nanocomposite thin films containing Al2O3 and TiO2 nanoparticles S. Lewis et al. Thin Solid Films 2010 | View |
| Characterization of an Ultra High Aspect Ratio Electron Beam Resist for Nano-Lithography S. Lewis et al. NSTI - Nanotech 2010 - Conference Proceedings 2010 | View |